Matheson offers a configured single cylinder gas cabinet with a 9400 Series Analytical Grade Panel.  All piping penetrations are through the top of the cabinet through a bulkhead plate.

Warning: This gas cabinet is not suitable for silane service

Standard Configuration

• 1177 Single Cylinder Gas Cabinet 

The Model 1170 is our most popular gas cabinet series with a flat top design. The construction is optimized for economy, without compromising safety or quality.

Panel Options

• 9400 Series
The 9400 Series Cross Purge Panel provides a safe high-purity connection (face seal) between system, gas supply and the Semiconductor Grade regulators, with valves, and system to perform a cylinder change out purge.

• Regulator Type 

A single-stage regulator is recommended where inlet pressure does not vary greatly or where periodic adjustment of delivery pressure does not present a problem. The advantage of a dual-stage pressure regulator over a single-stage pressure regulator is its ability to deliver a constant pressure, even when the inlet pressure decreases.

Gas Connections

• Process Gas Outlet: 1/4" Face Seal - Male
• Purge Gas Inlet: 1/4" Face Seal - Male

	Recommended Safety Package
	Gas Detection Gas Specific (GSD Series) Gas Sensor is able to detect any dangerous leaks and is typically coupled with a GSM-12 Controller and an ESO valve.
	GSM-12 Shutdown Controller< The GSM-12 controller is typically used to operate a pneumatically operated, normally closed, emergency shutoff valve (ESO) on a gas panel. It has ten sets of contacts for alarm conditions: • Excess Flow • Exhaust Failure • Gas Detector Warning • Gas Detector Alarm • Fire Detector • Low Cylinder Contents (by pressure or weight) • High Delivery Pressure • Process Line Containment • Remote Start • Remote Shutdown (Sensors ordered separately) Delay times between when a fault condition is first sensed and when an actual shutdown or alarm occurs have been programmed to avoid any nuisance alarm tripping. The controller also has an ABORT button on the front for manual shutdown.
	Emergency Shutoff Valve (ESO) The 4384 Series Air Operated Valve is Normally Closed (NC). It is installed at the inlet of the panel and is operated by the GSM-12 Controller. It has a diaphragm seal for high purity and low diffusion.

Other Options

	Other Shutdown Options
	Exhaust Failure Switch (option X) Switch used to indicate low exhaust suction. This is a popular option with the GSM-12

	Ventilation Options
	Magnahelic (option M) Gives visual status of exhaust suction (option M). This is often paired with the exhaust failure switch Range: 0-3" WC
	Fusible Link (option L) Blocks air from entering cabinet in case of fire. Temperature rating: 165 F Approvals - UL & C-UL Listed and FM Approved
	Diffuser Plate with Filter (option D) To prevent small particulates from entering the cabinet interior.

Instructions

Instructions, 1170 Series

Instructions, Purging