Matheson offers a configured single cylinder gas cabinet with a 9000 Series Analytical Grade Panel.  All piping penetrations are through the top of the cabinet through a bulkhead plate.

Warning: This gas cabinet is not suitable for silane service. 

Standard Configuration

• 1177 Single Cylinder Gas Cabinet 

The Model 1170 is our most popular gas cabinet series with a flat top design. The construction is optimized for economy, without compromising safety or quality.

• 9000 Series Panel 

The Pressure Control Module provides a safe high-purity connection (face seal) between system, gas supply and the Semiconductor Grade regulators.

Panel Options

• 9001 Series
The Pressure Control Module provides a safe high-purity connection (face seal) between system, gas supply and the Semiconductor Grade regulators. 

• 9400 Series
The 9400 Series Cross Purge Panel provides a safe high-purity connection (face seal) between system, gas supply and the Semiconductor Grade regulators, with valves, and system to perform a cylinder change out purge.

• Regulator Type 

A single-stage regulator is recommended where inlet pressure does not vary greatly or where periodic adjustment of delivery pressure does not present a problem. The advantage of a dual-stage pressure regulator over a single-stage pressure regulator is its ability to deliver a constant pressure, even when the inlet pressure decreases.

Gas Connections

• Process Gas Outlet: 1/4" Face Seal - Male
• Vent Valve Outlet (option): 1/4" Face Seal - Male
• Purge Gas Inlet (option): 1/4" Face Seal - Male

Instructions

Instructions, 1170 Series

Instructions, Purging