Products
Categories
- Home
- Specialty Gas Equipment
- Regulators
- Semiconductor Grade Regulators
- 9001 Series Single-Stage Semiconductor Grade Pressure Control Module
Product Description
The Semiconductor Grade Pressure Control Module provides a safe high-purity connection (VCR type) between system, gas supply and the Semiconductor Grade regulators.
The Model 9001 Pressure Control Module includes the following features/components:
• 316 stainless steel panel
• Electropolished 316 stainless steel pigtail
• Male VCR type and butt-welded CGA connection on pigtail
• Aluminum plumbing mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10-9 scc/sec
• Panel mounting holes to fit Matheson Gas Cabinet
Pressure Regulator Design Features
• 316L stainless steel with 316 stainless steel internals
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec Helium
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting
Part Number* | Max Delivery Pressure |
Delivery Pressure Gauge |
Cylinder Pressure Gauge |
With Outlet Valve | |||
SEQ90019303VCGA | 30 psi | -30"-0-60 psi | 0-3000 psi |
SEQ90019307VCGA | 100 psi | -30"-0-200 psi | 0-3000 psi |
No Outlet Valve |
|||
SEQ90019303NCGA | 30 psi | -30"-0-60 psi | 0-3000 psi |
SEQ90019307NCGA | 100 psi | -30"-0-200 psi | 0-3000 psi |
*Note: where CGA is replaced by the actual CGA number. Some CGA limitations may apply.
Materials of Construction
• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal
Specifications
• Maximum Inlet Pressure: 3000 psi (20,700) kPa
• Maximum Flow Rate: 11 SCFM (320 SLPM) (At 3000 psi Inlet, N2)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Outlet Fitting: 1/4” VCR-Male
• Porting: 1/4” VCR compatible
Wall Mounting Kit |
|||
Wall Mounting Kit This is mounting kit for a panel. The kit includes two 18" long pieces of Aluminum U-channel and four sets of nuts and bolts to secure the panel to the U-channel. This kit does not include the hardware to mount the U-channel to a wall. Wall Mounting Kit - 18" |
Instructions
Instructions, Semiconductor Grade Regulator