Ultra high-purity stainless steel regulators for use with semiconductor applications.

Applications

• All semiconductor industry gas applications, such as dispensing of forming gases, blanketing procedures, or etching operations.

Design Features

• 316L stainless steel with 316 stainless steel internals
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting

*Note: V4FM = 1/4" female face seal inlet and 1/4" male face seal outlet

Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal 

Specifications

• Maximum Inlet Pressure: 3000 psi (20,700) kPa
• Maximum Flow Rate: 11 SCFM (320 SLPM) (At 3000 psi Inlet, N2)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Porting: 1/4” face seal
• Porting Configuration: 2 High, 2 Low
• Face-to-face dimension: 3.70"

Flow Curves

Flow Curves, 9300/9310 Series

Instructions

Instructions, Semiconductor Grade Regulator