Semiconductor Grade, ultra high-purity line regulators with a tied seat design for use with corrosive, toxic, or pyrophoric gases.

Applications

• Point of use regulation of gases used in semiconductor manufacturing, such as etchant or dopant gases.

Design Features

• Tied seat design ensures regulator closure under extreme circumstances
• 2” delivery pressure gauge
• Autogeneous butt-welded connections
• Only one non-metallic component in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a Class 100 clean area
• Body screw thread tapped for back mounting

*Note: V4FM = 1/4" female VCR inlet and 1/4" male VCR outlet

Materials of Construction

• Gauge: 316 stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal

Specifications

• Maximum Inlet Pressure: 300 psi (2070 kPa)
• Maximum Flow Rate: 14 SCFM (400 SLPM) (At 300 psi Inlet, N2)
• Flow Coefficient (Cv): 0.36
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Face to Face: 4.30"
• Porting: 1/4” VCR compatible
• Porting Configuration: 1 High, 2 Low

Instructions

Instructions, Semiconductor Grade Regulator

3D Model

9333-3-V4FM