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9002 Series Dual-Stage Semiconductor Grade Pressure Control Module

USD $4,328.38

9002 Series Dual-Stage Semiconductor Grade Pressure Control Module

USD $4,328.38
Part Number:    9002 Series

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Product Description

MATHESON made in the USA



The Pressure Control Module provides a safe high-purity connection (VCR type) between system, gas supply and the Semiconductor Grade regulators. NOTE: Photo does not match product.

The Model 9002 Pressure Control Module includes the following features/components:

• 316 stainless steel panel
• Electropolished 316 stainless steel pigtail
• Semiconductor Grade diaphragm outlet-isolation valve
• Male VCR type and butt-welded CGA connection on pigtail
• Aluminum plumbing mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10-9 scc/sec
• Panel mounting holes to fit Matheson Gas Cabinet

Pressure Regulator Design Features

• 316L stainless steel with 316 stainless steel internals
• Dual tied seat design ensures regulator closure under extreme conditions
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• The seats are the only non-metallic components in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnets
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a Class 100 clean area


Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnets: Nickel plated brass
• Diaphragms: 316 stainless steel
• Seats: Kel-F 81
• Linkages: 316 stainless steel
• Springs: 316 stainless steel
• Seals: Metal to metal


• Maximum Inlet Pressure: 3000 psig (20,700)
• Maximum Flow Rate: 5 SCFM (150 SLPM) (At 3000 psig Inlet, N2)
• Flow Capacity (Cv): 0.05
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Outlet Fitting: 1/4” VCR-Male
• Porting: 1/4” VCR compatible



• Wall Mounting Kit
This is mounting kit for a panel. The kit includes two 18" long pieces of Aluminum U-channel and four sets of nuts and bolts to secure one panel to the U-channel. This kit does not include the hardware to mount the U-channel to a wall.
Wall Mounting Kit - 18"

Instructions, Semiconductor Grade Regulator

3D Model

9002 Panel

Warranty Information