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9001 Series Single-Stage Semiconductor Grade Pressure Control Module

USD $4,121.41

9001 Series Single-Stage Semiconductor Grade Pressure Control Module

USD $4,121.41
Part Number:    9001 Series
   Availability:   Ships within 48 hours from Montgomeryville, PA

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Product Description

MATHESON made in the USA



The Semiconductor Grade Pressure Control Module provides a safe high-purity connection (VCR type) between system, gas supply and the Semiconductor Grade regulators.

The Model 9001 Pressure Control Module includes the following features/components:

• 316 stainless steel panel
• Electropolished 316 stainless steel pigtail
• Male VCR type and butt-welded CGA connection on pigtail
• Aluminum plumbing mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10-9 scc/sec
• Panel mounting holes to fit Matheson Gas Cabinet

Pressure Regulator Design Features

• 316L stainless steel with 316 stainless steel internals
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec Helium
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting

Ordering Information  
Part Number* Max
Delivery Pressure
Delivery Pressure
Cylinder Pressure
With Outlet Valve      
SEQ90019303VCGA 30 psi -30"-0-60 psi 0-3000 psi
SEQ90019307VCGA 100 psi -30"-0-200 psi 0-3000 psi

No Outlet Valve
SEQ90019303NCGA 30 psi -30"-0-60 psi 0-3000 psi
SEQ90019307NCGA 100 psi -30"-0-200 psi 0-3000 psi

*Note: where CGA is replaced by the actual CGA number. Some CGA limitations may apply.

Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal 


• Maximum Inlet Pressure: 3000 psi (20,700) kPa
• Maximum Flow Rate: 11 SCFM (320 SLPM) (At 3000 psi Inlet, N2)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Outlet Fitting: 1/4” VCR-Male
• Porting: 1/4” VCR compatible

  Wall Mounting Kit
  Wall Mounting Kit
This is mounting kit for a panel. The kit includes two 18" long pieces of Aluminum U-channel and four sets of nuts and bolts to secure the panel to the U-channel. This kit does not include the hardware to mount the U-channel to a wall.
Wall Mounting Kit - 18"



Instructions, Semiconductor Grade Regulator

3D Model

9001 Panel

Warranty Information