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9001 Series Single-Stage Semiconductor Grade Pressure Control Module

USD $2,379.78

9001 Series Single-Stage Semiconductor Grade Pressure Control Module

USD $2,379.78
Part Number:    9001 Series
   Availability:   Ships within 48 hours from Montgomeryville, PA


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Product Description

MATHESON made in the USA

 

 

The Semiconductor Grade Pressure Control Module provides a safe high-purity connection (VCR type) between system, gas supply and the Semiconductor Grade regulators.

The Model 9001 Pressure Control Module includes the following features/components:

• 316 stainless steel panel
• 3 foot electropolished 316 stainless steel pigtail
• Male VCR type and butt-welded CGA connection on pigtail
• Aluminum plumbing mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10-9 scc/sec
• Panel mounting holes to fit Matheson Gas Cabinet

Pressure Regulator Design Features

• 316L stainless steel with 316 stainless steel internals
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting

oi-9001-panels.jpg

Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal 

Specifications

• Maximum Inlet Pressure: 3000 psig (20,700) kPa
• Maximum Flow Rate: 11 SCFM (320 SLPM) (At 3000 psig Inlet, N2)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Outlet Fitting: 1/4” VCR-Male
• Porting: 1/4” VCR compatible
 

Option

kit-0773.jpg

• Wall Mounting Kit
This is mounting kit for a panel. The kit includes two 18" long pieces of Aluminum U-channel and four sets of nuts and bolts to secure one panel to the U-channel. This kit does not include the hardware to mount the U-channel to a wall.
Wall Mounting Kit - 18"

Instructions, Semiconductor Grade Regulator

Warranty Information