A dual stage high-purity regulator designed for analytical applications using a less than 10% Fluorine mixture or less than 5% with a cross purge

Applications

• Supply of high-purity less than 10% Fluorine mixture or less than 5% with a cross purge to applications requiring constant delivery pressure.

Design Features

• High-purity 316 stainless steel barstock body
• High-purity 316 stainless steel diaphragm
• Metal to metal seals minimize diffusion of contaminants
• 2” inlet and delivery pressure gauges
• Bonnet ported and threaded to pipe gases away from work area
• Equipped with outlet diaphragm valve
• 1/4” compression tube outlet connection
• 10 micron metal filter protects seat from contamination
• Optional interstage relief valve available
• Panel mountable, front and back bonnet threaded
• Bonnet vent hole size: 1/8” NPTF

Materials of Construction

• Gauges: 316 stainless steel
• Body: 316 stainless steel
• Bonnets: Chrome plated brass barstock
• Diaphragms: 316 stainless steel
• Seats:
          1st Stage – Teflon
          2nd Stage – Teflon
• Seals: Metal to metal
• CGA inlet fitting: Monel

Specifications

• Maximum Inlet Pressure: 3000 psi (20,700 kPa)
• Typical Maximum Flow Rate (100 psi del press) : 7 SCFM (200 SLPM)
• Flow Capacity (Cv): 0.06
• Operating Temperature: -40°F to 140°F (-40°C to 60°C)
• Porting (Regulator Body): 1/4” NPT Female
• Porting Configuration: 2 High, 3 Low, l Interstage

Flow Curves

Flow Curves, 3120A/3810A Series

Instructions

Instructions, General Regulator