This panel is a 9300 Series Cross Purge Panel with an NFPA label for Silicon Tetrafluoride (SiF4) provides a safe high-purity connection (VCR type) between system, gas supply and the Semiconductor Grade regulators, with valves, and system to perform a cylinder change out purge.

Design Features

• Tied diaphragm dual-stage Semiconductor Grade Regulator, 9460 series (100 Psig)
• Semiconductor Grade cross purge with Semiconductor Grade diaphragm valves
• Semiconductor Grade diaphragm low pressure isolation valve
• Electropolished butt welded 316 stainless steel pigtail with CGA or DISS connections
• 316 stainless steel panel
• Aluminum mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10^-9 sccsec Helium
• CGA 330 pigtail connection

Instructions, Purging