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- NANOCHEM® PuriFilter® Gas Purifier with 0.003 micron Filter
Product Description
The NANOCHEM® PuriFilter® is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter® has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter® is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters® provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter® is a direct replacement for in-line particle filters and a typical location for this product would be directly before the process chamber or mass flow controller.
Features and Benefits
• Purification for point-of-use applications
• Highest Lifetimes
• Best Impurity Removal Efficiencies
– Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
• Patented built-in poppet valves at purifier inlet and outlet
– Reduces / eliminates media exposure to atmospheric air during purifier installation
– Reduces operator exposure to residual process gas during purifier removal
• Enhances manufacturing process economy and improves equipment performance
• Provides consistently high purity gas under fluctuating inlet impurity conditions
• Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
• Compact size for ease of installation
• Does not require heating or cooling
• Low overall cost of ownership
Part Number | Media | Gases | Impurities Removed |
UEQ 10600376001 | OMX™ | Inert Nitrogen Argon Helium Xenon Krypton Neon |
< 0.1 ppb H2O, O2, CO2 LDL < 1 ppb CO* |
UEQ 10600376002 | OMX™ | Flammable Hydrogen Deuterium Methane Ethane Cyclopropane Propane Butane |
< 0.1 ppb H2O, O2, CO2 LDL < 1 ppb CO* NOX, SOX, H2S |
UEQ 10600376011 | OPX | Oxygenated Oxygen Carbon Dioxide Nitrous Oxide |
< 10 ppb H2O |
UEQ 10600376006 | OMA™ | Ammonia | < 0.1 ppb H2O, O2, CO2 in inert gas LDL < 45 ppb H2O in ammonia LDL |
UEQ 10600376017 | Desicore™ | Germane | < 5 ppb H2O in GeH3 LDL |
UEQ 10600376015 | CleanCorr™ | Hydrogen Fluoride | < 2 ppm H2O LDL |
UEQ 10600376007 | OMS™ | Sulfur Hexafluoride | < 0.1 ppb H2O, O2, CO2 in inert gas LDL < 10 ppb O2, H2O in sulfur hexafluoride LDL |
LDL - Lower Detection Limit by State-of-the-Art Analytical Instrumentation
NMHC - Non-methane Hydrocarbons
*Note: CO is removed efficiently by OMX media at low flow rates (recommended 1/10 of normal flow rate)
For a detailed list of purification media and impurities removed, refer to the Purification Media Table in NANOCHEM® Purification Solutions Brochure
Materials of Construction
• Body: 316L stainless steel
• Filter: 316L stainless steel
• Button gasket: Nickel 200
Specifications
• Maximum operating pressure: 1000 psi (7 MPa)
• Max flow: 3 slpm (0.2 NM3/hr)
• Filter: 0.003 µm with 99.9999999% retention (PALL Ultramet-L® )
• Internal surface finish: < 10 µin Ra
• Maximum operating temperature: 158°F (70°C)
• Inlet/Outlet: 1/4" MVCR - compatible