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NANOCHEM® PuriFilter® Gas Purifier with 0.003 micron Filter

USD $2,480.63

NANOCHEM® PuriFilter® Gas Purifier with 0.003 micron Filter

USD $2,480.63
Part Number:    UEQ PF-Series
   Availability:   Ships within 3-5 days from Longmont, CO.


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Product Description

MATHESON made in the USA

 

 

The NANOCHEM® PuriFilter® is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter® has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter® is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters® provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter® is a direct replacement for in-line particle filters and a typical location for this product would be directly before the process chamber or mass flow controller.

Features and Benefits 

• Purification for point-of-use applications
• Highest Lifetimes
• Best Impurity Removal Efficiencies
– Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
• Patented built-in poppet valves at purifier inlet and outlet
– Reduces / eliminates media exposure to atmospheric air during purifier installation
– Reduces operator exposure to residual process gas during purifier removal
• Enhances manufacturing process economy and improves equipment performance
• Provides consistently high purity gas under fluctuating inlet impurity conditions
• Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
• Compact size for ease of installation
• Does not require heating or cooling
• Low overall cost of ownership

Ordering Information  
Part Number Media Gases Impurities
Removed
UEQ 10600376001 OMX™ Inert
Nitrogen
Argon
Helium
Xenon
Krypton
Neon
< 0.1 ppb H2O, O2, CO2 LDL
< 1 ppb CO*
UEQ 10600376002 OMX™ Flammable
Hydrogen
Deuterium
Methane
Ethane
Cyclopropane
Propane
Butane
< 0.1 ppb H2O, O2, CO2 LDL
< 1 ppb CO*
NOX, SOX, H2S
UEQ 10600376011 OPX Oxygenated
Oxygen
Carbon Dioxide
Nitrous Oxide
< 10 ppb H2O
UEQ 10600376006 OMA™ Ammonia < 0.1 ppb H2O, O2, CO2 in inert gas LDL
< 45 ppb H2O in ammonia LDL
UEQ 10600376017 Desicore™ Germane < 5 ppb H2O in GeH3 LDL
UEQ 10600376015 CleanCorr™ Hydrogen Fluoride < 2 ppm H2O LDL
UEQ 10600376007 OMS™ Sulfur Hexafluoride < 0.1 ppb H2O, O2, CO2 in inert gas LDL
< 10 ppb O2, H2O in sulfur hexafluoride LDL

LDL - Lower Detection Limit by State-of-the-Art Analytical Instrumentation
NMHC - Non-methane Hydrocarbons
*Note: CO is removed efficiently by OMX media at low flow rates (recommended 1/10 of normal flow rate)

For a detailed list of purification media and impurities removed, refer to the Purification Media Table in NANOCHEM®  Purification Solutions Brochure

Materials of Construction

• Body: 316L stainless steel
• Filter: 316L stainless steel
• Button gasket: Nickel 200

Specifications

• Maximum operating pressure: 1000 psi (7 MPa)
• Max flow: 3 slpm (0.2 NM3/hr)
• Filter: 0.003 µm with 99.9999999% retention (PALL Ultramet-L® )
• Internal surface finish: < 10 µin Ra
• Maximum operating temperature: 158°F (70°C)
Inlet/Outlet:  1/4" MVCR - compatible

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Safety Data Sheets (SDS)

SDS, NANOCHEM®  OPX

Warranty Information

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