NANOCHEM® PuriFilter® Gas Purifier with 0.003 micron Filter

USD $2,480.63

NANOCHEM® PuriFilter® Gas Purifier (Inerts)

NANOCHEM® PuriFilter® Gas Purifier with 0.003 micron Filter

USD $2,480.63

Part Number: UEQ PF-Series

Availability: Ships within 3-5 days from Longmont, CO.

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Product Description

The NANOCHEM® PuriFilter® is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter® has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter® is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters® provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter® is a direct replacement for in-line particle filters and a typical location for this product would be directly before the process chamber or mass flow controller.

Features and Benefits

• Purification for point-of-use applications
• Highest Lifetimes
• Best Impurity Removal Efficiencies
– Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
• Patented built-in poppet valves at purifier inlet and outlet
– Reduces / eliminates media exposure to atmospheric air during purifier installation
– Reduces operator exposure to residual process gas during purifier removal
• Enhances manufacturing process economy and improves equipment performance
• Provides consistently high purity gas under fluctuating inlet impurity conditions
• Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
• Compact size for ease of installation
• Does not require heating or cooling
• Low overall cost of ownership

Ordering Information
Part Number	Media	Gases	Impurities Removed
UEQ 10600376020	INX	Inert Nitrogen Argon Helium Xenon Krypton Neon	< 0.1 ppb H₂O, O₂, CO, CO₂ LDL
UEQ 10600376020	INX	Flammable - Standard Hydrogen Methane Ethane Propane Butane	< 0.1 ppb H₂O, O₂, CO, CO₂ LDL
UEQ 10600376002	OMX™	Deuterium	< 0.1 ppb H₂O, O₂, CO₂ LDL < 1 ppb CO* NO_X, SO_X, H₂S
UEQ 10600376011	OPX	Oxygenated Oxygen Carbon Dioxide Nitrous Oxide	< 10 ppb H₂O
UEQ 10600376006	OMA™	Ammonia	< 0.1 ppb H₂O, O₂, CO₂ in inert gas LDL < 45 ppb H₂O in ammonia LDL
UEQ 10600376017	Desicore™	Germane	< 5 ppb H₂O in GeH₃ LDL
UEQ 10600376015	CleanCorr™	Hydrogen Fluoride	< 2 ppm H₂O LDL
UEQ 10600376007	OMS™	Sulfur Hexafluoride	< 0.1 ppb H₂O, O₂, CO₂ in inert gas LDL < 10 ppb O₂, H₂O in sulfur hexafluoride LDL

LDL - Lower Detection Limit by State-of-the-Art Analytical Instrumentation
NMHC - Non-methane Hydrocarbons
*Note: CO is removed efficiently by OMX media at low flow rates (recommended 1/10 of normal flow rate)

For a detailed list of purification media and impurities removed, refer to the Purification Media Table in NANOCHEM® Purification Solutions Brochure

Materials of Construction

• Body: 316L stainless steel
• Filter: 316L stainless steel
• Button gasket: Nickel 200

Specifications

• Maximum operating pressure: 1000 psi (7 MPa)
• Max flow: 3 slpm (0.2 NM³/hr)
• Filter: 0.003 µm with 99.9999999% retention (PALL Ultramet-L® )
• Internal surface finish: < 10 µin Ra
• Maximum operating temperature: 158°F (70°C)
• Inlet/Outlet: 1/4" Male face seal