The NANOCHEM® PuriFilter® is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter® has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter® is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters® provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter® is a direct replacement for in-line particle filters and a typical location for this product would be directly before the process chamber or mass flow controller.

Features and Benefits 

• Purification for point-of-use applications
• Highest Lifetimes
• Best Impurity Removal Efficiencies
– Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
• Patented built-in poppet valves at purifier inlet and outlet
– Reduces / eliminates media exposure to atmospheric air during purifier installation
– Reduces operator exposure to residual process gas during purifier removal
• Enhances manufacturing process economy and improves equipment performance
• Provides consistently high purity gas under fluctuating inlet impurity conditions
• Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
• Compact size for ease of installation
• Does not require heating or cooling
• Low overall cost of ownership

LDL - Lower Detection Limit by State-of-the-Art Analytical Instrumentation
NMHC - Non-methane Hydrocarbons
*Note: CO is removed efficiently by OMX media at low flow rates (recommended 1/10 of normal flow rate)

For a detailed list of purification media and impurities removed, refer to the Purification Media Table in NANOCHEM®  Purification Solutions Brochure

Materials of Construction

• Body: 316L stainless steel
• Filter: 316L stainless steel
• Button gasket: Nickel 200

Specifications

• Maximum operating presure: 1000 psi (7 MPa)
• Max flow: 3 slpm (0.2 NM³/hr)
• Filter: 0.003 µm with 99.9999999% retention (PALL Ultramet-L® )
• Internal surface finish: < 10 µin Ra
• Maximum operating temperature: 158°F (70°C)
• Inlet/Outlet:  1/4" MVCR - compatible