Ultra high-purity stainless steel regulators for use with semiconductor applications.

Applications

• All semiconductor industry applications requiring precise pressure control.

Design Features

• 316L stainless steel with 316 stainless steel internals
• Dual tied seat design ensures regulator closure under extreme conditions
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• The seats are the only non-metallic components in the process stream
• Standard 10 Ra surface finish
• Sealed and ventable bonnets
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a Class 100 clean area

*Note: V4FM = 1/4" female face seal inlet and 1/4" male face seal outlet

Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnets: Nickel plated brass
• Diaphragms: 316 stainless steel
• Seats: Kel-F 81
• Linkages: 316 stainless steel
• Springs: 316 stainless steel
• Seals: Metal to metal

Specifications

• Maximum Inlet Pressure: 3000 psi (20,700)
• Maximum Flow Rate: 0.5 SCFM (15 SLPM) (At 400 psi Inlet, N2)
• Flow Capacity (Cv): 0.05
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Porting: 1/4” face seal
• Porting Configuration: 2 High, 2 Low
• Face-to-face dimension: 3.70"

Flow Curves

Flow Curves, 9460/9470 Series

Instructions

Instructions, Semiconductor Grade Regulator

3D Model

9467-4-V4FM