The 9400 Series Cross Purge Panel provides a safe high-purity connection (Face Seal) between system, gas supply and the Semiconductor Grade regulators, with valves, and system to perform a cylinder change out purge.

Design Features

• Tied diaphragm Semiconductor Grade Regulator, 9360 series
• Semiconductor Grade cross purge with Semiconductor Grade diaphragm valves
• Semiconductor Grade diaphragm low pressure isolation valve
• Electropolished butt welded 316 stainless steel pigtail with CGA or DISS connections
• 316 stainless steel panel
• Aluminum mounting brackets
• Expert assembly in class 100 clean room
• Helium leak testing of components to 1 x 10^-9 scc/sec Helium
• Panel mounting holes to fit Matheson Gas Cabinets

*Note: where CGA is replaced by the actual CGA number. Some CGA limitations may apply.

Materials of Construction (Regulator)

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal 

Specifications

• Maximum Inlet Pressure: 3000 psi (20,700) kPa
• Maximum Flow Rate: 11 SCFM (320 SLPM) (At 3000 psi Inlet, N2)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Outlet Fitting: 1/4” Face Seal - Male

	Wall Mounting Kit
	Wall Mounting Kit This is mounting kit for a panel. The kit includes two 18" long pieces of Aluminum U-channel and four sets of nuts and bolts to secure the panel to the U-channel. This kit does not include the hardware to mount the U-channel to a wall. Wall Mounting Kit - 18"

Instructions

Instructions, Purging

Instructions, Semiconductor Grade Regulator

Drawing

Drawing, 9400 Panel

3D Model

9400 Panel