Ultra high-purity stainless steel regulators with a tied seat design, for use with corrosive, toxic, or pyrophoric gases.

Applications

• All semiconductor industry gas applications, such as dispensing of dopant or etchant gases, or handling hazardous gases.

Design Features

• 316L stainless steel with 316 stainless steel internals
• Tied seat design ensures regulator closure under extreme conditions.
• 2” inlet and delivery pressure gauges
• Autogeneous butt-welded connections
• Only one non-metallic seal in the process stream
• Standard 10-15 Ra surface finish
• Sealed and ventable bonnet
• Helium leak tested to 1 x 10-9 scc/sec
• Assembled, tested and packaged in a class 100 clean area
• Body screw thread tapped for back mounting

*Note: V4FM = 1/4" female face seal inlet and 1/4" male face seal outlet

Materials of Construction

• Gauges: 316L stainless steel
• Body: 316L stainless steel
• Bonnet: Nickel plated brass
• Diaphragm: 316 stainless steel
• Seat: Kel-F 81
• Linkage: 316 stainless steel
• Spring: 316 stainless steel
• Seals: Metal to metal 

Specifications

• Maximum Inlet Pressure: 3000 psi (20,700 kPa)
• Maximum Flow Rate (At 3000 psi Inlet, N2):
          Model 9367 - 17 SCFM (480 SLPM)
          Model 9363 - 7 SCFM (200 SLPM)
• Flow Capacity (Cv): 0.09
• Operating Temperature: -40°F to 160°F (-40°C to 71°C)
• Porting: 1/4” face seal
• Porting Configuration: 2 High, 2 Low
• Face-to-face dimension: 3.70"

Flow Curves

Flow Curves, 9360/9370 Series

Instructions

Instructions, Semiconductor Grade Regulator

3D Model

9363-4-V4FM