The NANOCHEM® PuriFilter® is a compact purifier/filter combination designed for placement internal to the process tool, delivering the gas purity required in a sub-micron fabrication environment. The PuriFilter® has a patented valve-in-gland seal that enables integrity of the media bed when the PuriFilter® is installed. The valve also reduces leakage of any residual hazardous gases when the purifier is removed. PuriFilters® provide insurance against virtually all variables that cause contamination, including gas impurities introduced through the gas jungle. The PuriFilter® is a direct replacement for in-line particle filters and a typical
location for this product would be directly before the process chamber or mass flow controller.

Features and Benefits

• Purification for point-of-use applications
• Highest Lifetimes
• Best Impurity Removal Efficiencies
– Removes critical contaminants to sub parts-per-billion level (<0.1 ppb in inert gases)
• Patented built-in poppet valves at purifier inlet and outlet
– Reduces / eliminates media exposure to atmospheric air during purifier installation
– Reduces operator exposure to residual process gas during purifier removal
• Enhances manufacturing process economy and improves equipment performance
• Provides consistently high purity gas under fluctuating inlet impurity conditions
• Improves component lifetime and reduces particle generation by removing moisture and volatile metals from corrosive gases
• Compact size for ease of installation
• Does not require heating or cooling
• Low overall cost of ownership

Specifications

• Flow rates up to 3 slpm (0.2 NM3/hr)
• All wetted parts, Type 316L stainless steel with Nickel 200 button gasket
• 0.003 µm PALL Ultramet-L® stainless steel particle filter with 99.9999999% retention
• Outer diameter of 1.5 inches (38.1 mm) and total length of 3.31 inches (84.07 mm) after installation of custom gaskets
• Internal surface finish < 10 µin Ra
• Maximum allowable working pressure of 1000 psi (7 MPa)
• Maximum operating temperature 70°C
• Inlet/Outlet:  1/4" MVCR - compatible