The NANOCHEM® OMX™ purification medium has long been the industry standard for purifying inert and flammable gases for a variety

of semiconductor applications, including low temperature SiGe Epi. NANOCHEM® OMX-Plus™ offers all the benefits of NANOCHEM® OMX™ medium — the highest lifetimes and the best efficiencies for impurity removal as well as patented true endpoint detection to give advance warning of purifier depletion. OMX-Plus™ also offers removal of trace non-methane aliphatic and aromatic hydrocarbons from source gases and system component outgassing.

Features and Benefits

• Direct purification of inert and flammable gases used in ultra-high purity applications:

Inert Gases
Nitrogen
Argon
Helium
Xenon
Krypton
Neon
Carbon Tetrafluoride

Flammable Gases
Hydrogen
Methane
Deuterium

• Highest Lifetimes
• Best Impurity Removal Efficiencies
• Patented Fiber-Optic End-Point Detection available
• Removes Oxygenated Species (H2O, O2, CO, CO2, NOx, SOx, etc.) and non-Methane Hydrocarbons (NMHC)
• Improves and ensures gas purity for process consistency: higher yield / device quality
• No external power source required
• Does not require heating or cooling

Specifications

• Inlet: 1/4"Face Seal - Female
• Outlet: 1/4"Face Seal - Male
• Valve Type: 1/4" Springless Diaphragm
• Valve Actuation: Manual
• Inboard Leak Rate: 1 x 10^-9 sccs-He
• Filter Performance: 99.9999999% (9-log) of all particles ≥ 0.003µm, except Models L-OMX-Plus-500-HF and L-OMX-Plus-500-DC-HF (with flow rates > 6 slpm) which is 99.99% (4 log) of all particles ≥ 0.003µm

Pure “PPT” Performance (H2O and O2)
Removal of oxygen and moisture impurities is typically at the detection limits of APIMS, 30-100 ppt (parts per trillion) measured at the
outlet of the purifier.

Materials of Construction

• Shell: 316L Stainless Steel
• Valve Diaphragm: Elgiloy
• Valve Seat: PCTFE
• Outlet Filter: 316L Stainless Steel/PTFE
• Other Metallic Parts: 316L Stainless Steel
• Gaskets: Nickel 200